The Spare Parts Department
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The Spare Parts Department .com, a division of Kiedon International GmbH, is representative to several Principal's and supply partner companies. The companies, some with more than 30 years experience, are all established, expert producers of their respective products, and offer cost-of-ownership advantages over OEM supplied parts. These advantages may be obtained through design upgrades offering superior performance, longer life or advantageous pricing. All manufacture under controlled environments according to comprehensive QA procedures, and supply to major users. 

Through our supply network we offer a range of alternatively sourced, fully compatible parts and components for semiconductor equipment manufactured by leading OEM's, such as: Applied Materials, Novellus, Varian, TEL, MRC, Lam Research, ASM Hitachi, Tegal, and others. Equipment types supported include, but are not limited to, PVD, CVD, etch, CMP, and ion-implant. The product range also includes pre-owned, unused OEM spares - view catalogues.

Fab view

Metal parts
non-metal parts

The Spares Parts Department

Rings Seals
Bellows Electro static Chucks
Pedestals Blinds
Cooling plates Shower heads
UV lamps Refurbished- chambers


Tel: +49 351 871 8153


Fax: +49 351 871 8154

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