A
wide range replacement Electrostatic chucks. Products range extends
through refurbished units, new ceramic sprayed, or a
ceramic-sprayed-polyamide upgrade. The upgraded units provide
excellent backside gas control and center to edge uniformity ,
providing an increased efficiency in thermal conductance with the
wafer. The ceramic ESC can be installed as a direct replacement for
the polyamide unit, and In the majority of cases process recipe
changes are not required. Please send a request, and ask if we have
a compatible product for your system/application.
A
comprehensive regeneration procedure for CVD Susceptors. Al
consumable parts are replaced. A product improvement program has
been applied to the re-manufacture of the anodized plate to help
minimize the effects of common failure mechanisms.
Similar
in nature to classical CVD susceptors, P-chucks and C-chucks
require, from time to time, reconditioning and recalibration. The
part is completely stripped, all conssumables are replaced and the
ceramic and aluminium nitride parts are refreshed.
After
some time in use, these esc's can experience a fall in performance
due to surface degradation and gas leakage. A reconditioning process
is available to return the unit to an as-new condition.
The
minimum contact area or MCA chuck is a complex component
incorporating both heater and e-chuck. The unit has a ceramic top
plate with wafer stand-off pads and the neck incorporates a bellows
assembly. After some time, the top surface pads can become eroded
and result in a drop off in performance. Further, the bellows unit
can need replacement. This chuck can be fully refurbished to correct
these issues. Two regeneration programmes are avaiable.