Select a product category or product of interest. The lists shown here are not exhaustive. If you cannot find the product of interest. send an unlisted product request, and we will contact you. (NB, the 'Auto-enquiry feature is only 'Active' if session cookies are enabled; see User Information.)


Heater blocks

Components index

Heater pedestal

Heater blocks

Heater assemblies

Embedded element heaters

Ceramic heaters


Chucks & Susceptors

Materials index

Electro Static Chucks

CVD susceptor

C(P) chucks

Speed ESC

MCA heater/chuck


Metal parts

Modular units index

PVD clamp ring

Shower head / GDP

Welded Metal Bellows

200mm / 300mm parts

Refurb. & repair program


Non-metallic parts



Quartz products

Ceramic products


Silicon Carbide / Al nitride

Plastics (Teflon, Vespel . . .)

Speciality parts & services

Modular units index

Liquid filtration

Hybrid ceramic bearings, handlers

PVD magna-packs

Thin section bearings

CMP parts


WJ AP CVD parts


Transport belts

N2 shields



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