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A wide range replacement Electrostatic chucks. Products range extends through refurbished units, new ceramic sprayed, or a ceramic-sprayed-polyamide upgrade. The upgraded units provide excellent backside gas control and center to edge uniformity , providing an increased efficiency in thermal conductance with the wafer. The ceramic ESC can be installed as a direct replacement for the polyamide unit, and In the majority of cases process recipe changes are not required. Please send a request, and ask if we have a compatible product for your system/application. |
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A comprehensive regeneration procedure for CVD Susceptors. Al consumable parts are replaced. A product improvement program has been applied to the re-manufacture of the anodized plate to help minimize the effects of common failure mechanisms. |
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Similar in nature to classical CVD susceptors, P-chucks and C-chucks require, from time to time, reconditioning and recalibration. The part is completely stripped, all conssumables are replaced and the ceramic and aluminium nitride parts are refreshed. |
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After some time in use, these esc's can experience a fall in performance due to surface degradation and gas leakage. A reconditioning process is available to return the unit to an as-new condition. |
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The minimum contact area or MCA chuck is a complex component incorporating both heater and e-chuck. The unit has a ceramic top plate with wafer stand-off pads and the neck incorporates a bellows assembly. After some time, the top surface pads can become eroded and result in a drop off in performance. Further, the bellows unit can need replacement. This chuck can be fully refurbished to correct these issues. Two regeneration programmes are avaiable. |
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