Heater Pedestals (refurbished  / preowned)

High quality second source 100% compatible replacement units for Novellus equipment. Manufactured in high purity aluminium, incorporating Ni/Cr heating elements. The pedestals are built to the highest standards to meet or exceed the performance of the original OPM. 

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Heater Blocks (new / refurbished)

New or full reconditioned heater blocks for various process equipment Novellus, wafer diameters from 5 to 8 inch. Dependent upon the equipment type and part number, the units can be supplied new, or fully refurbished. All units are shipped to meet and exceed OEM specifications. Remanufactured units have been fully analyzed, characterized and tested and are supplied to users worldwide.  To find out more about this program, please call or email us.

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Heater Assembly's (reconditioned)

Our heater block refurbishment program also includes a range of heater xz-type assembly's for equipment made by Applied Materials. Due to the architecture of these units, the heater elements cannot be reliably exchanged. However, the units are fully reconditioned and the heaters tested and re-qualified. Units are shipped to meet and exceed original specifications. For further information regarding available parts numbers, etc., please call or email us.

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Embedded Element Heater Blocks (reconditioned)

Other types of embedded heaters can also be reconditioned. The program includes addition heaters for equipment originally manufactured by Applied Materials, ASM, Mattson and Novellus. All refurbished and reconditioned units are fully tested prior to shipment. For further information regarding available parts numbers, etc., please call or email us.

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Ceramic Heaters (refurbished / preowned)

From time to time it can be that these ceramic type heaters fail due to de-bonding of the electrodes, the ceramic piece parts or ware at tear on the wafer mounting surface. Our program includes complete regeneration of these heaters including redefinition of the top surface. Please contact us for further information regarding this program. 

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Dual Zone Heater (refurbished / preowned)

Part of the ceramic heater program, Dual Zone Heater assemblies can also be refurbished. Please call or email us.

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